Elemental boron doping behavior in silicon molecular beam epitaxy
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چکیده
منابع مشابه
Segregation and trapping of erbium during silicon molecular beam epitaxy
Erbium surface segregation is observed during growth of Er-doped Si by molecular beam epitaxy on Si~100! at 600 °C. Once a critical Er surface areal density of 2310 Er/cm is reached, enhanced Er trapping is observed, possibly due to the formation of silicide precipitates. Er segregation on Si~100! is fully avoided when growth is performed in an oxygen background pressure of ; 10 mbar, due to th...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1991
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.104614